How to increase size of rectangle and circle in node and vertical lines inside the rectangle

Question

documentclass[12pt,table]{article}
begin{document}
usepackage{tikz}
usepackage{pgfplots}
usetikzlibrary{arrows,positioning} 
tikzstyle{arrow}=[thick,->,>=stealth]
usepackage{subcaption}
usetikzlibrary{shapes}

begin{tikzpicture}[scale=1.2]

path (4,2) node [cloud, draw,cloud puffs=9,cloud puff arc=90, aspect=1.7, inner ysep=.3em](F1){}
(5,2) node[circle,draw,circle = 1cm](F2){}
(5,2.3) node[align = center]{}
(6,2) node[rectangle,draw](F3){}
(6,1.75) node[align = center]{}
(7,2) node[circle,draw](F4){}
(7,2.25) node[align = center]{}
(8,2) node[cloud, draw,cloud puffs=9,cloud puff arc=90, aspect=1.7, inner ysep=.3em](F5){}
(3.5,1.5) node[circle,draw,circle = 1cm](F6){}
(3.5,1.75) node[align = center]{};
draw (F1) -- (F2);
draw[->](F2)--(F3);
draw(F3) -- (F4);
draw[->](F4)--(F5);
end{tikzpicture}
end{document}

Zarko · Answer

You can define minimum size of nodes:
documentclass[tikz, margin=3mm, tikz]{standalone}
usetikzlibrary{arrows.meta,
                chains,
                positioning,
                shapes.multipart, shapes.symbols}

begin{document}
    begin{tikzpicture}[
node distance = 9mm and 7mm,
  start chain = F going right,
   arr/.style = {-Straight Barb},
  base/.style = {draw, semithick, 
                 minimum size=3em}, % <--- define size of nodes
     C/.style = {base, circle},
  MPNh/.style = {base, % Multi Part Node horizontal
                 rectangle split, rectangle split parts=4,
                 rectangle split horizontal}, 
 oblak/.style = {base, minimum width=4em,
                 cloud, cloud puffs=9, cloud puff arc=150, aspect=2},
                        ]
    begin{scope}[nodes={on chain, join=by arr}]
node [oblak]   {};
node [C]       {};
node [base]    {};
node [C]       {};
node [oblak]   {};
    end{scope}
node [C, above=of F-3] {};
    end{tikzpicture}
end{document}

In above MWE I took a liberty and draw you nodes in chain using the tikz library chains and also its macro join.
Since your preamble is not known, I use standalone. You can replace it with ehatever, however, in this case you need load tikz package and delete margin option.

Edit:
Added vertical lines in rectangle nodes, i.e. rectangle is replaced by multipart node.

How to increase size of rectangle and circle in node and vertical lines inside the rectangle

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